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MARSI-1050
홈 > Product List > MARSI-1050

THE SPECIFICATION

  • Description

    Optical Coating Chamber

  • Type

    Front Load Box Coater

  • Chamber Diameter

    Φ1050x1300H

  • Vacuum Pumping Syste

    Low Vacuum Pump
    - Oil Rotary Pump E2M275
    - Mechanical Booster Pump EH1200
    High Vacuum Pump
    - Oil Diffusion Pump MRV 22" 2Set
    Optionsp
    - Cryo-Pump or Turbo Molecular Pump

  • Chamber Heating Syste

    Max Temperature
    - Up to 400℃
    Type
    - Halogen Lamp
    Options
    - Micro-Sheathe Heater

  • Valves

    Main Valve
    - 22" 2set
    Roughing Valve
    - NW40 Type 1set,6" 1set
    Fore Line Valve
    - 6" 2set
    Vent Valve
    - NW25 Type 1set

  • Substrate Holder Type

    Dome orlanetary,
    Rotation Speed 0 to 25 RPM

  • Vacuum Measurement System

    GP-307(High Vacuum Sensor :
    1, Low Vacuum Sensor : 2)

  • ptional

    - Thin film deposition controller
    - Optical monitor & Controlle
    - Ion beam source
    - Electron beam source
    - Poly coid (D/P, chamber)
    - Chiller
    - Touch screen control system
    - Others

  • User Utility

    Power Consumption 380/220V
    3-ph AC 50/60Hz 30/40kW
    Compressed air supply pressure 5~8kgf/㎠
    Cooling water supply
    - Pressue
    - 2~3kgf/㎠
    - Temperature
    - 18 to 25℃

  • THE SPECIFICATION

  • - GLASSES-AR, BBAR, RX lens
    - Color Filter-LCD, DLP Projection
    - Optical Dichroic Filter-Welding Filter, Laser Protector Filter
    - Band Pass Filter-Laser Window, Sensor Window, UV/IR Cut Filte
    - IR Cut Filter-CCD Camera, Mobile Phone Camera, Illuminator
    - Hydrophobic Coating
    - Metal Mirror, Color Glass, Lamp & Reflector
    - Polarization Beam Splitters-Beam Splitting, Spectrometry, DVD-RW

하단 바
(SAMJEONG-DONG, BUCHOEN TECHNOPARK SSANG YONG 3rd) 104 Complex,
Fist floor-112,397 Seokcheon-Ro,Bucheon-City, Gyeonggi-province, Korea
Tel:+82-32-324-1992 Fax;+82-32-324-8077 | Mail:ifhunter@intectrading.co.kr
Factory:Add:#118-3,Samrak-Dong,Sasang-GU,Busan,Korea

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