THE SPECIFICATION
-
Description
Optical Coating Chamber
-
Type
Front Load Box Coater
-
Chamber Diameter
Φ1650x1400H
-
Vacuum Pumping Syste
Low Vacuum Pump
- Oil Rotary Pump 412J
- Mechanical Booster Pump EH2400
High Vacuum Pump
- Oil Diffusion Pump MRV 28" 2Set
- Cryo-Pump or Turbo Molec
Optionsp
- Cryo-Pump or Turbo Molecular Pump -
Chamber Heating Syste
Max Temperature
- Up to 400℃
Type
- Halogen Lamp
Options
- Micro-Sheathe Heater
-
Valves
Main Valve
- 28" 2set
Roughing Valve
- NW40 Type 1set, 6" 1set
Fore Line Valve
- 6" 2set
Vent Valve
- NW40 Type 1set
-
Substrate Holder Type
Dome orlanetary,
Rotation Speed 0 to 25 RPM -
Vacuum Measurement System
GP-307(High Vacuum Sensor :
1, Low Vacuum Sensor : 2) -
ptional
- Thin film deposition controller
- Optical monitor & Controlle
- Ion beam source
- Electron beam source
- Poly coid (D/P, chamber)
- Chiller
- Touch screen control system
- Others -
User Utility
Power Consumption 380/220V
3-ph AC 50/60Hz 30/40kW
Compressed air supply pressure 5~8kgf/㎠
Cooling water supply
- Pressue
- 2~3kgf/㎠
- Temperature
- 18 to 25℃
-
- GLASSES-AR, BBAR, RX lens
- Smart Phone Case, Smart Phone Camera Lens
- Touch Screen
- Hydrophobic Coating
- Metal Mirror
THE SPECIFICATION